Finishing of metal optics by ion beam technologies
The beam constriction and the working distance can be tuned by adjusting the grid curvature. 27 With a curvature radius of 150 mm and a screen grid opening of 10 mm, a narrow ion beam with a full width at half maximum (FWHM) of ∼ 5 mm and a strong ion current density of 8.1 mA / cm 2 are obtained at the working distance of 32 mm .